Factory of the future

IRB 1300 PECVD Silicon Wafer handling

IRB 1300 picks up the silicon wafers from the trestle and load the pieces into the graphite boat

Product parameters
Articulated robots
IRB 1300
Payload(KG)
11
10
7
Reach(m)
0.9
1.15
1.4
Pos. rep. (mm)
0.02
0.023
0.03
Mounting
Any angle
Protection
Standard:IP40
Axes
6
Controller
OmniCore C30/C90XT